PECVD-AlOx/SiNx Passivation Stacks on Silicon: Effective Charge Dynamics and Interface Defect State Spectroscopy-Reference-Cited by-同舟云学术

PECVD-AlOx/SiNx Passivation Stacks on Silicon: Effective Charge Dynamics and Interface Defect State Spectroscopy

Published:2014 Issue: Volume:55 Page:845-854
ISSN:1876-6102
Container-title:Energy Procedia
language:en
Short-container-title:Energy Procedia

Author:

Töfflinger Jan Amaru,Laades Abdelazize,Leendertz Caspar,Montañez Liz Margarita,Korte Lars,Stürzebecher Uta,Sperlich Hans-Peter,Rech Bernd

Publisher

Elsevier BV

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