Influence of sputtering conditions on the structure and properties of Ti–Si–N thin films prepared by r.f.-reactive sputtering
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference20 articles.
1. Mechanisms of reactive sputtering of titanium nitride and titanium carbide II: Morphology and structure
2. Transmission electron microscopy studies of growth and interface structure of chemically vapour deposited TiC and TiN films on WCCo alloy subsrates
3. Color of titanium nitride prepared by reactive dc magnetron sputtering
4. Electrical and colorimetric properties of TiN thin films prepared by DC reactive sputtering in a facing targets sputtering (FTS) system
5. Investigation of reactively sputtered TiN films for diffusion barriers
Cited by 79 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Synthesis of high conformalty Ti-Six-N films using (CH3)3CCl and SiH4; density functional theory simulation and film characterization;Thin Solid Films;2024-07
2. Effect of the TiSiN interlayer properties on the adhesion and mechanical properties of multilayered TiSiCN thin films;Surface and Coatings Technology;2024-02
3. Structure, Mechanical and Thermal Properties of TiSiWN Coatings;Coatings;2023-01-08
4. Synthesis of High Conformalty Ti-Six-N Films Using (Ch3)3ccl and Sih4; Density Functional Theory Simulation and Film Characterization;2023
5. Effect of the Bias Voltage Variation of the Tisin Interlayer on the Adhesion and Mechanical Properties of the Multilayered Ti/Tin/Tisin/Tisicn Thin Film System;2023
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3