Structural and tribological characterization of multilayer ta-C films prepared by filtered cathodic vacuum arc with substrate pulse biasing
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference16 articles.
1. Properties of carbon ion deposited tetrahedral amorphous carbon films as a function of ion energy
2. Raman studies of tetrahedral amorphous carbon films deposited by filtered cathodic vacuum arc
3. Modification of tetrahedral amorphous carbon film by concurrent Ar ion bombardment during deposition
4. Tribological Properties of Tetrahedral Carbon Films Deposited by Filtered Cathodic Vacuum Arc Technique
5. Nanocrystallites in tetrahedral amorphous carbon films
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