Properties of carbon ion deposited tetrahedral amorphous carbon films as a function of ion energy-Reference-Cited by-同舟云学术

Properties of carbon ion deposited tetrahedral amorphous carbon films as a function of ion energy

Published:1996-05-01 Issue:9 Volume:79 Page:7234-7240
ISSN:0021-8979
Container-title:Journal of Applied Physics
language:en
Short-container-title:

Author:

Xu Shi¹,Tay B. K.¹,Tan H. S.¹,Zhong Li¹,Tu Y. Q.¹,Silva S. R. P.²,Milne W. I.²

Affiliation:

1. School of Electrical and Electronic Engineering, Nanyang Technological University, Singapore 2263, Singapore

2. Engineering Department, Trumpington Street, Cambridge University, Cambridge CB2 1PZ, United Kingdom

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Reference23 articles.

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2. I. I. Aksenov, S. I. Vakula, V. G. Padalka, V. E. Strelnitskii, and V. M. Khoroshikh, Sov. Phys. Tech. Phys. 25, 1164 (1980).SPTPA30038-5662

3. P. J. Martin, S. W. Filipczuk, R. P. Netterfield, J. S. Field, D. F. Whitnall, and D. R. McKenzie, J. Mater. Sci. Lett. 7, 410 (1988).JMSLD50261-8028

4. P. J. Martin, R. P. Netterfield, T. J. Kinder, and L. Descotes, Surf. Coat. Technol. 49, 239 (1991).SCTEEJ0257-8972

5. D. R. McKenzie, D. Muller, and B. A. Pailthorpe, Phys. Rev. Lett. 67, 773 (1991).PRLTAO0031-9007

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