Modification of tetrahedral amorphous carbon film by concurrent Ar ion bombardment during deposition
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference19 articles.
1. Compressive-stress-induced formation of thin-film tetrahedral amorphous carbon
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3. Compressive-stress-induced formation of thin-film tetrahedral amorphous carbon
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