Raman studies of tetrahedral amorphous carbon films deposited by filtered cathodic vacuum arc
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference19 articles.
1. Structure and hardness of diamond-like carbon films prepared by arc evaporation
2. Deposition of TiN, TiC, and TiO2 films by filtered arc evaporation
3. Compressive-stress-induced formation of thin-film tetrahedral amorphous carbon
4. Fabrication of amorphous diamond films
5. Properties of filtered-ion-beam-deposited diamondlike carbon as a function of ion energy
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