Influence of substrate bias on the structure and mechanical properties of ta-C:W films deposited by filtered cathodic vacuum arc
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference36 articles.
1. Deposition of smooth tetrahedral amorphous carbon thin films using a cathodic arc without a macroparticle filter
2. Thick stress-free amorphous-tetrahedral carbon films with hardness near that of diamond
3. Mechanical properties and Raman spectra of tetrahedral amorphous carbon films with high sp3 fraction deposited using a filtered cathodic arc
4. Hardness, elastic modulus, and structure of very hard carbon films produced by cathodic‐arc deposition with substrate pulse biasing
5. Deposition of superhard amorphous carbon films by pulsed vacuum arc deposition
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1. Effect of insert mid-frequency pulses on I–V characterisation, deposition rates and properties of nc-WC/a-C:H films prepared by superimposed HiPIMS process;Surface and Coatings Technology;2018-09
2. Principles, Methods, Formation Mechanisms, and Structures of Nanomaterials Prepared via Gas-Phase Processes;Physical Fundamentals of Nanomaterials;2018
3. Effect of substrate bias on the tribological behavior of ta-C coating prepared by filtered cathodic vacuum arc;International Journal of Precision Engineering and Manufacturing;2017-05
4. Microstructure, mechanical and tribological properties of WC/a-C:H coatings deposited by cathodic arc ion-plating;Vacuum;2016-10
5. 60 years of DLC coatings: Historical highlights and technical review of cathodic arc processes to synthesize various DLC types, and their evolution for industrial applications;Surface and Coatings Technology;2014-10
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