Hardness, elastic modulus, and structure of very hard carbon films produced by cathodic‐arc deposition with substrate pulse biasing-Reference-Cited by-同舟云学术

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Hardness, elastic modulus, and structure of very hard carbon films produced by cathodic‐arc deposition with substrate pulse biasing

Published:1996-02-05 Issue:6 Volume:68 Page:779-781
ISSN:0003-6951
Container-title:Applied Physics Letters
language:en
Short-container-title:Appl. Phys. Lett.

Author:

Pharr George M.,Callahan Daniel L.,McAdams Shaun D.,Tsui Ting Y.,Anders Simone,Anders André,Ager Joel W.,Brown Ian G.,Bhatia C. Singh,Silva S. R. P.,Robertson John

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

Link

http://aip.scitation.org/doi/pdf/10.1063/1.116530

Reference23 articles.

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