Deposition of smooth tetrahedral amorphous carbon thin films using a cathodic arc without a macroparticle filter-Reference-Cited by-同舟云学术

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Deposition of smooth tetrahedral amorphous carbon thin films using a cathodic arc without a macroparticle filter

Published:1995-08-14 Issue:7 Volume:67 Page:894-896
ISSN:0003-6951
Container-title:Applied Physics Letters
language:en
Short-container-title:Appl. Phys. Lett.

Author:

Chhowalla M.,Weiler M.,Davis C. A.,Kleinsorge B.,Amaratunga G. A. J.

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

Link

http://aip.scitation.org/doi/pdf/10.1063/1.114728

Reference14 articles.

Cited by 24 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

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2. Special Arc Modes with Reduced Macroparticle Emission;Tetrahedrally Bonded Amorphous Carbon Films I;2018

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5. Fabrication of embedded conductive layer in polymer by plasma immersion ion implantation;SPIE Proceedings;2006-12-27

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