Mechanical properties and Raman spectra of tetrahedral amorphous carbon films with high sp3 fraction deposited using a filtered cathodic arc

Author:

Xu Shi1,Flynn D.1,Tay B. K.1,Prawer S.2,Nugent K. W.2,Silva S. R. P.3,Lifshitz Y.4,Milne W. I.5

Affiliation:

1. a School of Electric and Electronic Engineering, Nanyang Technological University , Nanyang Avenue, Singapore , 639798 , Singapore

2. b School of Physics and Microanalytical Research Centre, University of Melbourne , Parkville, Victoria , 3052 , Australia

3. c Department of Electronics and Electrical Engineering , University of Surrey , Guildford, Surrey , Gu2 5XH , England

4. d Soreq Nuclear Research Center , Yavne , 81800 , Israel

5. e Engineering Department , University of Cambridge , Trumpington Street, Cambridge , Cb2 1PZ , England

Publisher

Informa UK Limited

Subject

General Physics and Astronomy,General Chemical Engineering

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