Fundamental mechanisms of titanium nitride formation by d.c. magnetron sputtering-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Fundamental mechanisms of titanium nitride formation by d.c. magnetron sputtering

Published:1992-11 Issue: Volume:54-55 Page:338-342
ISSN:0257-8972
Container-title:Surface and Coatings Technology
language:en
Short-container-title:Surface and Coatings Technology

Author:

Richter F.,Kupfer H.,Giegengack H.,Schaarschmidt G.,Scholze F.,Elstner F.,Hecht G.

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference19 articles.

1. Structure and properties of TiN coatings

2. Target and substrate surface reaction kinetics in magnetron sputtering of nitride coatings

3. TiNx coatings prepared by d.c. reactive magnetron sputtering

4. Verh. 10. Tagung Grenzflächen/Dünne Schichten, Dresden;Ackermann,1990

Cited by 12 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Growth of carbon nanotube arrays on various CtxMey alloy films by chemical vapour deposition method;Journal of Materials Science & Technology;2018-03

2. Modifications of reactively sputtered titanium nitride films by argon and vanadium ion implantation: Microstructural and opto-electric properties;Thin Solid Films;2013-03

3. Nanoscale Visualization of Elastic Inhomogeneities at TiN Coatings Using Ultrasonic Force Microscopy;Nanoscale Research Letters;2009-09-16

4. Effect of substrate temperature on the structural properties of magnetron sputtered titanium nitride thin films with brush plated nickel interlayer on mild steel;Applied Surface Science;2008-12

5. Optimization of plasma parameters for high rate deposition of titanium nitride films as protective coating on bell-metal by reactive sputtering in cylindrical magnetron device;Applied Surface Science;2008-07

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号京ICP备18003416号-3