TiNx coatings prepared by d.c. reactive magnetron sputtering-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

TiNx coatings prepared by d.c. reactive magnetron sputtering

Published:1986-02 Issue:2 Volume:136 Page:229-239
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Musil J.,Bárdoš L.,Rajský A.,Vyskočil J.,Doležal B.,Lončar G.,Daďourek K.,Kubíček V.

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference26 articles.

1. TiN as a diffusion barrier in the Ti-Pt-Au beam-lead metal system

2. Properties of TiNxfilms reactively sputtered in an argon-nitrogen atmosphere

3. Applications of TiN thin films in silicon device technology

4. TiN formed by evaporation as a diffusion barrier between Al and Si

5. Optical constants and spectral selectivity of titanium carbonitrides

Cited by 45 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Effect of the N2/(Ar+N2) ratio on mechanical properties of high entropy nitride (Cr0.35Al0.25Nb0.12Si0.08V0.20)Nx films;Materials Chemistry and Physics;2021-12

2. Reactive deposition of TiN films by magnetron with magnetized hollow cathode enhanced target;Vacuum;2018-06

3. Improvement in crystallinity and electrical properties of TiN thin films deposited on ZnO underlayers;Japanese Journal of Applied Physics;2014-06-05

4. Study on the effect of target on plasma parameters of magnetron sputtering discharge plasma;Physics of Plasmas;2013-10

5. Controlling the initial phase of PECVD growth of vertically aligned carbon nanofibers on TiN;Sensors and Actuators A: Physical;2011-12

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号京ICP备18003416号-3