Study on the effect of target on plasma parameters of magnetron sputtering discharge plasma
Author:
Publisher
AIP Publishing
Subject
Condensed Matter Physics
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4825235
Reference30 articles.
1. Recent aspects concerning DC reactive magnetron sputtering of thin films: a review
2. Magnetron sputtering: a review of recent developments and applications
3. The characteristics of a planar magnetron operated at a high power input
4. Cold-cathode discharges and breakdown in argon: surface and gas phase production of secondary electrons
5. TiNx coatings prepared by d.c. reactive magnetron sputtering
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