Target and substrate surface reaction kinetics in magnetron sputtering of nitride coatings
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference27 articles.
1. Deposition Techniques for Films and Coatings;Bunshah,1982
2. Material selection for hard coatings
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4. Influence of apparatus geometry and deposition conditions on the structure and topography of thick sputtered coatings
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4. Toward efficient Cu(In,Ga)Se2solar cells prepared by reactive magnetron co-sputtering from metallic targets in an Ar:H2Se atmosphere;Progress in Photovoltaics: Research and Applications;2015-06-08
5. Structure and properties of multi-targets magnetron sputtered ZrNbTaTiW multi-elements alloy thin films;Surface and Coatings Technology;2013-08
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