Elastic and plastic energies in sputtered multilayered Ti–TiN films estimated by nanoindentation-Reference-Cited by-同舟云学术

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Elastic and plastic energies in sputtered multilayered Ti–TiN films estimated by nanoindentation

Published:2000-04 Issue:2-3 Volume:126 Page:131-135
ISSN:0257-8972
Container-title:Surface and Coatings Technology
language:en
Short-container-title:Surface and Coatings Technology

Author:

Kikuchi Naoto,Kitagawa Masaru,Sato Akishige,Kusano Eiji,Nanto Hidehito,Kinbara Akira

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference16 articles.

1. Mechanisms of reactive sputtering of titanium nitride and titanium carbide I: Influence of process parameters on film composition

2. Summary Abstract: Reactively sputtered TiN, ZrN, and HfN

3. Hafnium nitride coatings prepared by very high rate reactive sputtering

4. Measurement of Thin Film Mechanical Properties Using Nanoindentation

5. A method for interpreting the data from depth-sensing indentation instruments

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