Hafnium nitride coatings prepared by very high rate reactive sputtering
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference14 articles.
1. Structure and Electrical Properties of Sputtered Films of Hafnium and Hafnium Compounds
2. Machining evaluation of cemented carbide tools coated with HfN and TiC by the activated reactive evaporation process
3. High rate deposition of hafnium nitride by activated reactive evaporation (ARE)
4. An analytical approach to tool wear;Kramer,1979
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