Effects of process parameters on the properties of silicon oxide films using plasma enhanced chemical vapor deposition with tetramethoxysilane
Author:
Publisher
Elsevier BV
Subject
General Physics and Astronomy,General Materials Science
Reference39 articles.
1. Spectroscopic studies on preparation of silicon oxide films by PECVD using organosilicon compounds
2. A comparative study of oxygen/organosilicon plasmas and thin SiOxCyHz films deposited in a helicon reactor
3. Low dielectric constant films prepared by plasma-enhanced chemical vapor deposition from tetramethylsilane
4. SiO2 films deposited on silicon at low temperature by plasma-enhanced decomposition of hexamethyldisilazane: Defect characterization
5. Remote and direct microwave plasma deposition of HMDSO films: comparative study
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