Author:
Kuang Jao-Hwa,Chen Chao-Jung
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science,Civil and Structural Engineering
Reference19 articles.
1. Dynamic micromechanics on silicon: techniques and devices;Petersen;IEEE Transactions of Electronic Devices,1978
2. Osterberg P, Yie H, Cai X, White J, Senturia S. Self-consistent simulation and modeling of electrostatically deformed diaphragms. Proceedings of the IEEE Conference on Micro Electro Mechanical Systems, Osio, Japan, February 25–28, 1994. p. 28–32.
3. Electrostatic curved electrode actuators;Legtenberg;Journal of Microelectromechanical Systems,1997
4. Hirai Y, Shindo M, Tanaka Y. Study of large bending and low voltage drive electrostatic actuator with novel shaped cantilever and electrode. Proceedings of the International Symposium on Micromechanics and Human Science, 1998. p. 161–4.
5. Hirai Y, Marushima Y, Soda S, Jin D, Kawata H, Inoue K, Tanaka Y. Electrostatic actuator with novel shaped cantilever. Proceedings of the International Symposium on Micromechanics and Human Science, 2000. p. 223–7.
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