Vibration of electrically actuated MEMS Timoshenko microbeams based on a hierarchical beam element

Abstract

In this paper, vibration of Timoshenko microbeams with an axial force in micro-electromechanical systems (MEMS) is studied for the first time by using a nonlinear finite element procedure. Based on the von Kármán geometric nonlinearity and the modified couple stress theory (MCST), a beam element is formulated by employing hierarchical functions to interpolate the displacement field. Using the derived element, the discretized equation of motion for the microbeam is constructed and then solved by the Newton-Raphson iterative procedure in conjunction with the Newmark method. The natural frequencies, pull-in voltages and dynamic deflections are computed for a clamped-clamped microbeam under electrostatic actuation of a given direct current (DC) voltage. The numerical result reveals that the axial force and the microsize effect have a significant influence on the vibration, and the fundamental frequency of the microbeams is underestimated by ignoring the size effect. The effects of the axial force, the applied voltage and the material length scale parameter on the vibration of the beam are studied in detail and highlighted.