The Effect of the Electrode Position on the Dynamic Behavior of an Electrostatically Actuated Microcantilever-Reference-Cited by-同舟云学术

The Effect of the Electrode Position on the Dynamic Behavior of an Electrostatically Actuated Microcantilever

Published:2019-12-01 Issue:1 Volume:11 Page:34-41
ISSN:2066-8910
Container-title:Acta Universitatis Sapientiae, Electrical and Mechanical Engineering
language:en
Short-container-title:

Author:

Eshag Mohamed Ahmed¹²³,Zarog Musaab⁴

Affiliation:

1. School of Electrical Engineering , Southwest Jiaotong University , Chengdu , 610031 , China

2. School of Mechanical Engineering, Faculty of Engineering , Sudan University of Sciences and Technology , P.O. Box.407, Khartoum , Sudan

3. PLOP Department, Petro-Energy E&P Co. Ltd , PDOC & PE Tower, Alsunut Area, Almogran, Khartoum , Sudan

4. Department of Mechanical and Industrial Engineering, College of Engineering , Sultan Qaboos University , P.O. Box 33, Al-Khod, Muscat , 123, Oman

Abstract

Abstract Electrostatic actuators have major role in many MEMS devices, e.g. sensors, actuators. The amount of applied voltage to an electrostatic micro-actuator has a direct impact on the amplitude of deflection throughout the cantilever. This research aims to study the effect of the electrode length and the applied voltage on the amplitude of deflection of the micro-cantilever. Also, the resonant frequency for the cantilever was computed for full length and compared with simulation results. Finite element method, ANSYS was used as a simulation tool.

Publisher

Walter de Gruyter GmbH

Link

https://www.sciendo.com/pdf/10.2478/auseme-2019-0003

Reference8 articles.

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