Separation of composite defect patterns on wafer bin map using support vector clustering
Author:
Publisher
Elsevier BV
Subject
Artificial Intelligence,Computer Science Applications,General Engineering
Reference30 articles.
1. Support vector clustering;Ben-Hur;Journal of Machine Learning Research,2001
2. Regularized Gaussian discriminant analysis through eigenvalue decomposition;Bensmail;Journal of the American Statistical Association,1996
3. A neural-network approach to recognize defect spatial pattern in semiconductor fabrication;Chen;IEEE Transactions on Semiconductor Manufacturing,2000
4. Data mining for yield enhancement in semiconductor manufacturing and an empirical study;Chien;Expert Systems with Applications,2007
5. Automatic defect classification for semiconductor manufacturing;Chou;Machine Vision and Applications,1997
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