Resistivity profile measurements of proton-irradiated n-type silicon
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference22 articles.
1. IEEE Int. Electron Device Meeting, Tech. Dig.;Siber,1985
2. Localized lifetime control in insulated-gate transistors by proton implantation
3. Production of Fast Switching Power Thyristors by Proton Irradiation
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5. Physics of Semiconductor Devices;Sze,1981
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