Author:
Beanland D.G.,Temple W.,Chivers D.J.
Subject
Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Cited by
17 articles.
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1. Wafer Cooling, Faraday Design and Wafer Charging;Ion Implantation Science and Technology;1988
2. Laser annealing of silicon on sapphire ion implanted at elevated temperatures;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1987-04
3. Wafer cooling in ion implantation;Microelectronics Journal;1985-03
4. Current status of ion implantation equipment and techniques for semiconductor IC fabrication;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1985-01
5. Junction solar cells made with molecular beam glow discharge bombardment;Journal of Electronic Materials;1984-03