Author:
O'Neill A.G.,Wood A.C.G.,Phillips P.,Whall T.E.,Parker E.H.C.,Gundlach A.,Taylor S.
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Cited by
3 articles.
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1. Structural analysis of silicon dioxide and silicon oxynitride films produced using an oxygen plasma;IEEE Transactions on Plasma Science;1998
2. MONTE CARLO MODELLING OF 0.1µm DELTA‐DOPED MOSFETs;COMPEL - The international journal for computation and mathematics in electrical and electronic engineering;1994-04-01
3. A review of the plasma oxidation of silicon and its applications;Semiconductor Science and Technology;1993-07-01