A review of the plasma oxidation of silicon and its applications
Author:
Publisher
IOP Publishing
Subject
Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Link
http://stacks.iop.org/0268-1242/8/i=7/a=037/pdf
Reference58 articles.
1. Silicon Oxidation in an Oxygen Plasma Excited by Microwaves
2. Low‐temperature deposition of high‐quality silicon dioxide by plasma‐enhanced chemical vapor deposition
3. The effects of subcutaneous oxidation at the interfaces between elemental and compound semiconductors and SiO2 thin films deposited by remote plasma enhanced chemical vapor deposition
4. Plasma Anodization of Metals and Semiconductors
5. Analysis of characteristics of silicon metal/insulator/semiconductor tunnel diodes with d.c.-plasma-grown oxide
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