Optimization of a chromatically limited ion microprobe-Reference-Cited by-同舟云学术

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Optimization of a chromatically limited ion microprobe

Published:1984-12 Issue:4 Volume:2 Page:219-226
ISSN:0167-9317
Container-title:Microelectronic Engineering
language:en
Short-container-title:Microelectronic Engineering

Author:

Slingerland H.N.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference7 articles.

1. Proposal for a second generation IBPG (Ion Beam Pattern Generator);Slingerland,1984

2. Ion optics of ion microprobe instruments;Liebl;Vacuum,1983

3. Measurement of virtual cross-over in liquid gallium ion source;Komuro;Appl. Phys. Lett.,1983

4. Applications of focused ion beams;Wagner;Nucl. Instr. Met. Phys. Res.,1983

5. Emission characteristics of gallium and bismuth liquid metal field ion sources;Swanson;J. Vac. Sci. Technol.,1979

Cited by 5 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Optimisation of the properties of a microfocused ion beam system;Journal of Physics E: Scientific Instruments;1988-01

2. An achromatic mass filter employing permanent magnets for the Delft ion beam pattern generator;Microelectronic Engineering;1987-01

3. Progress on the Delft ion beam pattern generator;Microelectronic Engineering;1986-12

4. Some aspects of liquid metal ion sources;Journal of Microscopy;1986-05

5. Ion beam lithography (Ion sources and columns);Microelectronic Engineering;1985-12

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