Author:
Slingerland H.N.,Bohlander J.H.,v.d. Mast K.D.,Koets E.
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference3 articles.
1. Proposal for a second generation IBPG (Ion Beam Pattern Generator);Slingerland,1985
2. Optimization of a chromatically limited ion microprobe;Slingerland;Microelectronic Engineering,1984
3. Mass-spectra and isotopes;Aston,1933
Cited by
7 articles.
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1. Coulomb interactions in a shaped ion beam pattern generator;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1992-11
2. Focused ion beam technology;Vacuum;1991-01
3. Ion Lithography and Focused Ion Beam Implantation;Handbook of Vlsi Microlithography;1991
4. RECENT ADVANCE OF FOCUSED ION BEAM TECHNOLOGY IN JAPAN;Frontiers of Materials Research: Electronic and Optical Materials;1991
5. Focused ion beam processing;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1989-03