Author:
Bohlander J.H.,Slingerland H.N.,Koets E.,van der Mast K.D.
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
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Cited by
2 articles.
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1. Achromatic two-stage E*B mass filter for a focused ion beam column with collimated beam;Measurement Science and Technology;1993-07-01
2. Deflection for scanning ion beam systems;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1989-01