Measurements of negative ion density in O2/Ar electron cyclotron resonance plasma
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference23 articles.
1. Negative Ion Assisted Silicon Oxidation in Downstream of Microwave Plasma
2. Effects of dc bias on the kinetics and electrical properties of silicon dioxide grown in an electron cyclotron resonance plasma
3. Electrical properties of electron cyclotron resonance plasma-deposited silicon dioxide: effect of the oxygen to silane flow ratio
4. Electron energy distributions in plasmas IV. Oxygen and nitrogen
5. Negative ion-containing plasma in parallel-plate radio-frequency discharge in oxygen
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3. Effect of argon and oxygen gas concentration on mode transition and negative ion production in helicon discharge;Journal of Applied Physics;2020-11-14
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5. Study on negative ion production by electronegative gases in a helicon source;Japanese Journal of Applied Physics;2020-02-26
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