A method for measuring negative ion density distribution using harmonic currents in a low-pressure oxygen plasma
Author:
Funder
Korea Electric Power Corporation
Small and Medium Business Administration
National Research Foundation of Korea
Publisher
IOP Publishing
Subject
Condensed Matter Physics
Link
https://iopscience.iop.org/article/10.1088/1361-6595/ab9485/pdf
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1. Sterilization by oxygen plasma
2. The influence of substrate material on bacteria sterilization in an oxygen plasma glow discharge
3. Characteristics of ITO films with oxygen plasma treatment for thin film solar cell applications
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