Effects of nitrogen flow on R.F. reactive magnetron sputtered silicon nitride films on high speed steel-Reference-Cited by-同舟云学术

Effects of nitrogen flow on R.F. reactive magnetron sputtered silicon nitride films on high speed steel

Published:2004-01 Issue:3 Volume:176 Page:290-295
ISSN:0257-8972
Container-title:Surface and Coatings Technology
language:en
Short-container-title:Surface and Coatings Technology

Author:

Yau Bao-Shun,Huang Jow-Lay

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference33 articles.

1. V.I. Belyi, L.L. Vasilyeva, A.S. Ginovker, V.A. Gritsenko, S.M. Repinsky, S.P. Sinitsa, T.P. Smirnova, F.L. Edelman, Silicon Nitride in Electronics, Materials Science Monograph, New York, 1988

2. Properties of silicon nitride films prepared by magnetron sputtering

3. Topology of Silicon Structures with Recessed SiO2

4. The preparation, characterization and applications of silicon nitride thin films

5. Electric conduction in nitrogen‐rich silicon nitride films produced by SiH2Cl2and NH3

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