Reactive Sputtered Silicon Nitride as an Alternative Passivation Layer for Microelectrode Arrays in Sensitive Bioimpedimetric Cell Monitoring-Reference-Cited by-同舟云学术

Reactive Sputtered Silicon Nitride as an Alternative Passivation Layer for Microelectrode Arrays in Sensitive Bioimpedimetric Cell Monitoring

Published:2021-12-01 Issue:49 Volume:13 Page:59185-59195
ISSN:1944-8244
Container-title:ACS Applied Materials & Interfaces
language:en
Short-container-title:ACS Appl. Mater. Interfaces

Author:

Schmidt Sabine¹,Haensch Tobias¹,Frank Ronny¹^ORCID,Jahnke Heinz-Georg¹^ORCID,Robitzki Andrea A.¹

Affiliation:

1. Centre for Biotechnology and Biomedicine, Molecular Biological-Biochemical Processing Technology, Leipzig University, Deutscher Platz 5, D-04103 Leipzig, Germany

Funder

Bundesministerium f??r Bildung und Forschung

Publisher

American Chemical Society (ACS)

Subject

General Materials Science

Link

https://pubs.acs.org/doi/pdf/10.1021/acsami.1c14981

Reference63 articles.

1. Mediation of Biomaterial–Cell Interactions by Adsorbed Proteins: A Review

2. FEM-based design of optical transparent indium tin oxide multielectrode arrays for multiparametric, high sensitive cell based assays

3. A cell-based impedance assay for monitoring transient receptor potential (TRP) ion channel activity

4. Printed microelectrode arrays on soft materials: from PDMS to hydrogels

5. The effect of soft bake temperature on the polymerization of SU-8 photoresist

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