A model for reactive ion etching of PZT thin films
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference33 articles.
1. Dry Etching of PZT Films in an Ecr Plasma
2. Reactive ion etching of Pt/PZT/Pt ferroelectric thin film capacitors in high density DECR plasma
3. Plasma etch processing of advanced ferroelectric devices
4. Chemically Assisted ion-Beam Etching of Sol-Gel Derived Pzt, Plzt And LITaO3 Thin Films for Silicon Based Device Integration
5. Reactive ion Etching of Pt/PbZrxTi1−xO3/Pt Integrated Ferroelectric Capacitors
Cited by 15 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Challenges in fabrication and testing of piezoelectric MEMS with a particular focus on energy harvesters;Microsystem Technologies;2013-01-01
2. Microfabrication of bulk PZT transducers by dry film photolithography and micro powder blasting;Journal of Micromechanics and Microengineering;2012-07-05
3. Etching Characteristics and Mechanisms of Pb(Zr,Ti)O3, Pt, and SiO2in an Inductively Coupled HBr/Cl2Plasma;Japanese Journal of Applied Physics;2011-06-20
4. Etching Characteristics and Mechanisms of Pb(Zr,Ti)O3, Pt, and SiO2in an Inductively Coupled HBr/Cl2Plasma;Japanese Journal of Applied Physics;2011-06-01
5. Etching characteristics of Pb(Zr,Ti)O3, Pt, SiO2and Si3N4in an inductively coupled HBr/Ar plasma;Plasma Sources Science and Technology;2010-07-08
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3