Ion beam assisted deposition under off-normal ion incidence: an experimental and analytical study of re-sputtering effects
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference29 articles.
1. �ber die Kathodenzerst�ubung bei schiefem Aufparall der Ionen
2. Untersuchungen zur Festkörperzerstäubung bei schiefwinkligem Ionenbeschuß polykristalliner Metalloberflächen im Energiebereich um 1 keV
3. The angular dependence of the sputter yield maxima
4. Threshold energies of light-ion sputtering and heavy-ion sputtering as a function of angle of incidence
5. An empirical formula for angular dependence of sputtering yields
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