An empirical formula for angular dependence of sputtering yields
Author:
Publisher
Informa UK Limited
Subject
General Engineering
Link
http://www.tandfonline.com/doi/pdf/10.1080/00337578408222489
Reference17 articles.
1. Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline Targets
2. Untersuchungen zur Festkörperzerstäubung bei schiefwinkligem Ionenbeschuß polykristalliner Metalloberflächen im Energiebereich um 1 keV
3. Sputtering—a review of some recent experimental and theoretical aspects
4. Contributions of backscattered ions to sputtering yields depending on primary ion energy
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