Threshold energies of light-ion sputtering and heavy-ion sputtering as a function of angle of incidence
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference11 articles.
1. Sputtering Thresholds
2. The sputtering mechanism for low-energy light ions
3. An analytical formula and important parameters for low-energy ion sputtering
4. Theoretical studies on an empirical formula for sputtering yield at normal incidence
5. Sputtering and backscattering of keV light ions bombarding random targets
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