Theoretical studies on an empirical formula for sputtering yield at normal incidence
Author:
Publisher
Informa UK Limited
Subject
General Engineering
Link
http://www.tandfonline.com/doi/pdf/10.1080/00337578308218604
Reference23 articles.
1. Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline Targets
2. Sputtering and backscattering of keV light ions bombarding random targets
3. An analytical formula and important parameters for low-energy ion sputtering
4. Hydrodynamical approach to non-linear effects in sputtering yields
5. Computer simulation of atomic-displacement cascades in solids in the binary-collision approximation
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