Traceable calibration standard for the lateral axis of contact stylus instruments-Reference-Cited by-同舟云学术

Traceable calibration standard for the lateral axis of contact stylus instruments

Published:2004-12 Issue:12 Volume:257 Page:1241-1245
ISSN:0043-1648
Container-title:Wear
language:en
Short-container-title:Wear

Author:

Krüger-Sehm R.,Häßler-Grohne W.,Frühauf J.

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Mechanics of Materials,Condensed Matter Physics

Reference12 articles.

1. Tiefen- und Längennormale aus Silizium (Depth and Lateral Standards Made of Silicon)

2. Silicon standards for assessment and calibration of stylus probes;Frühauf;Ann. CIRP,2002

3. Problems of contour measuring on microstructures using a surface profiler;Frühauf;Meas. Sci. Technol.,1998

4. Das Maskenvermessungssystem Leitz LMS 2000 als Lösung für die hohen Anforderungen der Halbleiterindustrie, Teil 2: Aufbau und Arbeitsweise des Meßsystems LMS 2000;Bläsing-Bangert;Mitt. f. Wiss. u Technik Band,1991

5. ISO 3274: Geometrical Product Specifications (GPS) – Surface texture: Profile method: nominal characteristics of contact stylus instruments.

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