Determination of the transfer function for optical surface topography measuring instruments

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Determination of the transfer function for optical surface topography measuring instruments—a review

Published:2013-03-21 Issue:5 Volume:24 Page:052001
ISSN:0957-0233
Container-title:Measurement Science and Technology
language:
Short-container-title:Meas. Sci. Technol.

Author:

Foreman Matthew R,Giusca Claudiu L,Coupland Jeremy M,Török Peter,Leach Richard K

Publisher

IOP Publishing

Subject

Applied Mathematics,Instrumentation,Engineering (miscellaneous)

Link

http://stacks.iop.org/0957-0233/24/i=5/a=052001/pdf

Reference182 articles.

1. Optical Measurement of Surface Topography

2. Surface metrology

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