1. ISO 5436-1: 2000: GPS-Surface texture: Profile method; Measurement standards-Part 1: Material measures
2. Stylus profiling at high resolution and low force;Song;Applied Optics,1991
3. Influence of instrument parameters on profile measurements in the sub-micrometer range with stylus instruments;Trumpold,2000
4. Properties of Crystalline Silicon;Hull,1999
5. Silicon Micromachining, Cambridge Studies in Semiconductor Physics and Microelectronic Engineering;Elwenspoek,1998