Author:
Wang X.D.,Yu J.X.,Chen L.,Qian L.M.,Zhou Z.R.
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Mechanics of Materials,Condensed Matter Physics
Reference35 articles.
1. Introduction to applications and industries for microelectromechanical systems (MEMS);Walraven,2003
2. An industrial and applied review of new MEMS devices features;Tanaka;Microelectron. Eng.,2007
3. Trends and frontiers of MEMS;Ko;Sens. Actuators, A,2007
4. Friction and wear of rotating pivots in MEMS and other small scale devices;Williams;Wear,2001
5. Friction and wear properties in MEMS;Wang;Sens. Actuators, A,2002
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