An industrial and applied review of new MEMS devices features-Reference-Cited by-同舟云学术

An industrial and applied review of new MEMS devices features

Published:2007-05 Issue:5-8 Volume:84 Page:1341-1344
ISSN:0167-9317
Container-title:Microelectronic Engineering
language:en
Short-container-title:Microelectronic Engineering

Author:

Tanaka Masako

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference6 articles.

1. Frequency-selective MEMS for miniaturized low-power communication devices

2. C.T.-C. Nguyen, in: Proceedings of the 42nd Design Automation Conference, June, 2005, pp. 416–420.

3. Tam Harbert, Electronic Business, MEMS Market in the world, 1 April, 2005.

4. 2006 Press Releases from analog devices, 31st October, 2005.

5. News Release 2006 from Hitachi metals, 23rd August, 2006.

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