Principal image decomposition for multi-detector backscatter electron topography reconstruction
Author:
Funder
Agence Nationale de la Recherche
Publisher
Elsevier BV
Subject
Instrumentation,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference16 articles.
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4. Recent advances in 3D SEM surface reconstruction;Tafti;Micron,2015
5. A combination of topographical contrast and stereoscopy for the reconstruction of surface topographies in SEM;Beil;J. Microsc.,1990
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