1. Digital surface reconstruction in scanning electron microscopes using signals of a multiple detector system. Proceedings of the First International Conference on 3-D Image Processing in Microscopy;Beil;Eur. J. Cell Biol.,1989
2. Variable multiple detector system for secondary and backscattered electrons in a scanning electron microscope;Boengeler;EUREM 88 Inst. Conf. Ser.,1988
3. Breton , B.C. Thong , J.T.L. Nixon , W.C. 1986 A dynamic real time 3-D measurement technique for IC inspection Proc. Int. Conf. Microlithography 541 545
4. A contactless 3-D measuring technique for IC inspection;Breton;Proc. SPIE-Int. Soc. Opt. Eng. (U.S.A),1987
5. Smart sensing within a pyramid vision machine;Burt;Proc. IEEE.,1988