Atomic layer deposition of ZrO2 thin films using a new alkoxide precursor-Reference-Cited by-同舟云学术

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Atomic layer deposition of ZrO2 thin films using a new alkoxide precursor

Published:2002-05 Issue:1 Volume:303 Page:24-28
ISSN:0022-3093
Container-title:Journal of Non-Crystalline Solids
language:en
Short-container-title:Journal of Non-Crystalline Solids

Author:

Matero R.,Ritala M.,Leskelä M.,Jones A.C.,Williams P.A.,Bickley J.F.,Steiner A.,Leedham T.J.,Davies H.O.

Publisher

Elsevier BV

Subject

Materials Chemistry,Condensed Matter Physics,Ceramics and Composites,Electronic, Optical and Magnetic Materials

Reference13 articles.

1. Zirconium dioxide thin films deposited by ALE using zirconium tetrachloride as precursor

2. Atomic layer deposition of zirconium oxide from zirconium tetraiodide, water and hydrogen peroxide

3. Properties of Ta2 O 5‐Based Dielectric Nanolaminates Deposited by Atomic Layer Epitaxy

4. Dielectric Properties of Zirconium Oxide Grown by Atomic Layer Deposition from Iodide Precursor

5. Low-Temperature Deposition of Zirconium Oxide-Based Nanocrystalline Films by Alternate Supply of Zr[OC(CH3)3]4 and H2O

Cited by 47 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Surface Morphology of Various Matrixes with Zirconium Oxide Coatings Synthetized by Alternating Pulsing of Zirconium(IV) <i>tert</i>-Butoxide and Water Vapors Treatment of the Surface;Журнал общей химии;2024-07-02

2. New class of Zr precursor containing boratabenzene ligand enabling highly conformal wafer-scale zirconium dioxide thin films through atomic layer deposition;Surfaces and Interfaces;2024-03

3. Role of a cyclopentadienyl ligand in a heteroleptic alkoxide precursor in atomic layer deposition;The Journal of Chemical Physics;2024-01-08

4. Amidoxime-Containing Zr and Hf Atomic Layer Deposition Precursors for Metal Oxide Thin Films;Inorganic Chemistry;2023-12-18

5. Comparison of Ligand Architecture on Vapor Deposition Precursors: Synthesis, Characterization, and Reactivity of Volatile Cadmium Bis-Amidinate Complexes;Inorganic Chemistry;2021-04-14

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