Growth kinetics and thermal stress in AlN bulk crystal growth
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference28 articles.
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2. Rate-limiting process and growth kinetics of AlN thin films by microwave plasma CVD with AlBr3-NH3-N2 system
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4. The estimation of maximum growth rate for aluminium nitride crystals grown by direct sublimation
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