Low-temperature growth properties of Si1−xGex by disilane and solid-Ge molecular beam epitaxy
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference22 articles.
1. UHV/CVD growth of Si and Si:Ge alloys: chemistry, physics, and device applications
2. Gas source MBE growth of device materials
3. The growth properties of SiGe films on Si(100) using Si2H6 gas and Ge solid source molecular beam epitaxy
4. Band-gap luminescence in strain-symmetrized Sim/Gen superlattices grown by molecular beam epitaxy using gaseous Si2H6 and solid Ge
Cited by 6 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Influence of phosphine flow rate on Si growth rate in gas source molecular beam epitaxy;Journal of Crystal Growth;2000-12
2. Doping during low-temperature growth of materials for n–p–n Si/SiGe/Si heterojuction bipolar transistor by gas source molecular beam epitaxy;Journal of Crystal Growth;2000-01
3. Effect of Si overgrowth on the structural and luminescence properties of Ge islands on Si(100);Journal of Crystal Growth;1999-11
4. Enhanced hydrogen desorption from Si sites during low-temperature Si1−xGex growth by disilane and solid-Ge molecular beam epitaxy;Journal of Applied Physics;1999-05
5. Evolution of height distribution of Ge islands on Si(1 0 0);Journal of Crystal Growth;1999-04
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