Modified GSMBE for higher growth rate and non-selective growth
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference11 articles.
1. A study of nucleation in chemically grown epitaxial silicon films using molecular beam techniques I.—experimental methods
2. Characterization of n-channel Si/SiGe modulation doped structures grown by gas source molecular beam epitaxy
3. Magnetotransport of two-dimensional electron gas in modulation doped structures grown by gas source molecular beam epitaxy
4. Growth and characterization of Si1−xGex/Si multilayers on patterned Si(001) substrates using gas source molecular beam epitaxy
5. A surface kinetics model for the growth of Si1−xGexfilms from SiH4/GeH4mixtures
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