Study of oxygen depth distribution in Si1Ox and Mo1Ox films using 4He ion elastic scattering
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference17 articles.
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1. Surface oxygen implanted in titanium by recoil collisions with 1 MeV gold ions;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1996-10
2. Guidelines to the application of nuclear resonance to quantitative thin film analysis;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1996-09
3. Rapid thermal nitridation of thin chromium films;Applied Surface Science;1995-12
4. Rutherford Backscattering Spectrometry Investigation of the Effects of Oxygen and Hydrogen Pretreatment of Pyrolytically Coated Graphite on Pb Atomization;Analytical Chemistry;1995-01-15
5. An investigation of photoassisted diffusion of oxygen in solid C60 films using resonant alpha-scattering;Journal of Materials Research;1993-12
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