Author:
Kinomura A.,Takai M.,Hirai K.,Namba S.
Subject
Instrumentation,Nuclear and High Energy Physics
Cited by
4 articles.
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1. Nuclear microprobe analysis of implantation damage induced by focused gallium ion beams in GaAs;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1995-09
2. Focused MeV light ion beams for high resolution channeling contrast imaging;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1994-03
3. Nuclear microprobe development and application to microelectronics;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1994-03
4. Damage during Microchanneling Analysis Using 400 keV Helium Ion Microprobe;Japanese Journal of Applied Physics;1992-05-15